Rd= 0.61 / u sin

Question Answered step-by-step Rd= 0.61 / u sin Image transcription textFor SEM operating at very low current, the spot size is now limited by diffraction (Rd, same expression as inoptical microscope) and the spherical aberration which Is expressed as: R, = Ecsofl where Cs IS the sphericalaberration coefficient and a is the half-angle of the cone of beam from the focus spot to the objec… Show more… Show moreRd= 0.61λ/ u sin α  Science Physics NE MISC Share QuestionEmailCopy link Comments (0)